Author(s): Li, GH (Li, Guanghui); Cai, CC (Cai, Changchun); Zhang, Y (Zhang, Yan); Deng, X (Deng, Xiong); Lin, LZ (Lin, Liangzhong); Xiao, WB (Xiao, Wenbo)

Source: IEEE SENSORS JOURNAL Volume: 24 Issue: 4  Pages: 4304-4314  DOI: 10.1109/JSEN.2023.3347091  Published Date: 2024 FEB 15 

Abstract: In this article, a novel optical micro-electromechanical system (MEMS) acceleration sensor based on a metal Fabry-Perot (FP) microcavity is investigated using the transfer matrix method (TMM) and finite element analysis (FEA). The analytical calculation and simulation results show that the accelerometer has a wide measurement range, high sensitivity and resolution, good linearity, and low cross-axis sensitivity over the whole wavelength modulation range. The accelerometer has a linear measurement range of +/- 251 g, an optical system sensitivity of 1.9038, a mechanical sensitivity of 10.92 nm/g, a cross-axis sensitivity on the orthogonal axis as low as 0.09%, an accelerometer sensitivity up to 20.79 nm/g, and a resolution of 48.10 mu g (delta lambda = 1 pm). These functional characteristics make the proposed sensor have important application prospects in the fields of portable devices, biomedicine, and the Internet of Things, as well as autonomous driving and aerospace.

Accession Number: WOS:001173599400021

ISSN: 1530-437X

eISSN: 1558-1748