A Model of Dual Fabry-Perot Etalon-Based External-Cavity Tunable Laser Us...
Internal motion within pulsating pure-quartic soliton molecules in a fibe...
Enhanced light emission of germanium light-emitting-diode on 150 mm germa...
The Fabrication of GaN Nanostructures Using Cost-Effective Methods for Ap...
Negative-to-Positive Tunnel Magnetoresistance in van der Waals Fe3GeTe2/C...
Quantum Light Source Based on Semiconductor Quantum Dots: A Review
A High-Reliability RF MEMS Metal-Contact Switch Based on Al-Sc Alloy
Development of a Mode-Locked Fiber Laser Utilizing a Niobium Diselenide S...
Development of Multiple Fano-Resonance-Based All-Dielectric Metastructure...
Traffic Vibration Signal Analysis of DAS Fiber Optic Cables with Differen...
官方微信
友情链接

Reflection Coefficient Estimation of Femtosecond Laser Surface Processing Using Support Vector Regression

2022-11-07

 

Author(s): Liu, HT (Liu, Haoting); Ge, JY (Ge, Jianyue); Yang, SH (Yang, Shaohua); Zhang, L (Zhang, Ling); Xue, YF (Xue, Yafei); Lan, JH (Lan, Jinhui)

Source: IEEE PHOTONICS JOURNAL Volume: 14 Issue: 6 Article Number: 1557109 DOI: 10.1109/JPHOT.2022.3214238 Published: DEC 2022

Abstract: An image analysis-based Reflection Coefficient (RC) estimation method of femtosecond laser surface processing for the blackening of X-ray imaging sensor shell is proposed. The Support Vector Regression (SVR) is used for RC computation and both an offline and an online steps are considered in this method. Regarding offline step, the typical laser process parameters are set to perform surface processing and Scanning Electron Microscope (SEM) images are recorded. Then a series of image features are computed and both the computed image features and typical laser parameters are used to train SVR: the training dataset includes the laser line space, laser beam diameter, natural logarithm of laser power divided by laser frequency, and image features of Gray-Level Co-occurrence Matrix (GLCM); the supervising data are laser ablation diameters. As for online step, when SEM image data are recorded after laser processing, the trained SVR is used to predict laser ablation diameter and then the RC can be computed by laser ablation model. Many experiment results have verified the effectiveness of our proposed method, and the RC estimation accuracy can be better than 90.0%.

Accession Number: WOS:000871029700001

ISSN: 1943-0655

eISSN: 1943-0647

Full Text: https://ieeexplore.ieee.org/document/9918074



关于我们
下载视频观看
联系方式
通信地址

北京市海淀区清华东路甲35号(林大北路中段) 北京912信箱 (100083)

电话

010-82304210/010-82305052(传真)

E-mail

semi@semi.ac.cn

交通地图
版权所有 中国科学院半导体研究所

备案号:京ICP备05085259-1号 京公网安备110402500052 中国科学院半导体所声明