Author(s): Yang, WX (Yang, Wenxuan); Li, WC (Li, Wenchang); Lu, HX (Lu, Huaxiang); Liu, J (Liu, Jian); Zhang, TY (Zhang, Tianyi)

Source: SENSORS Volume: 22 Issue: 19 Article Number: 7229 DOI: 10.3390/s22197229 Published: OCT 2022

Abstract: Currently, integrated humidity sensors with fast-response time are widely needed. The most commonly used polyimide capacitive humidity sensor has a long response time, which is difficult to meet the need for a fast response. Most studies focusing on technology and materials have a high cost and are difficult to ensure compatability with the CMOS process. The dynamic compensation method can shorten the response time by only adding digital circuits or software processing. However, conventional compensation technology is not suitable for humidity sensors due to temperature coupling. This paper proposes a new dynamic compensation method for humidity sensors based on the decoupling of temperature factors by analyzing the coupling relationship between sensor dynamic characteristics and temperature. Simulations and experiments were used to verify the proposed method. The experimental results show that the proposed method reduces the humidity response time of the sensor by 85.6%. The proposed method can effectively shorten the response time of humidity sensors.

Accession Number: WOS:000867033400001

PubMed ID: 36236326

eISSN: 1424-8220

Full Text: https://www.mdpi.com/1424-8220/22/19/7229