Author(s): Xu, H (Xu, Hao); Wang, DY (Wang, Dongyi); Zheng, YQ (Zheng, Yiqiang); Liu, LC (Liu, Lingchen); Wang, XB (Wang, Xibin); Han, W (Han, Wei); Wang, LL (Wang, Lili)

Source: MICROELECTRONIC ENGINEERING Volume: 264 Article Number: 111869 DOI: 10.1016/j.mee.2022.111869 Published: AUG 15 2022

Abstract: Natural biological materials are attractive candidates for flexible pressure sensing because of their naturally occurring hierarchical structures and other desirable features (such as low cost, natural structure, and biocom-patibility) for flexible sensors. Inspired by the multilayered 3D interwoven fibrous network structure of the outer egg shell membrane (OESM), we proposed a facile dipping-coating process to convert it into a T3C2Tx MXene coated OESM (MX@OESM) film. Leveraging the unique structure inherited from the OESM, the MX@OESM film -based sensor exhibited high sensitivity (59 kPa-1) with a broad pressure range (up to 39.2 kPa), a subtle pressure detection limit (3.9 Pa), and excellent stability (over 5000 cycles). Furthermore, the MX@OESM film demon-strated suitable good biocompatibility in cytotoxicity tests. Based on the combination of outstanding sensing performance with high biocompatibility, the MX@OESM film-based flexible pressure sensor demonstrates immense potential in human physiological monitoring, and promises applications for biomaterials in flexible sensing.

Accession Number: WOS:000860727500002

ISSN: 0167-9317

eISSN: 1873-5568

Full Text: https://www.sciencedirect.com/science/article/pii/S0167931722001630?via%3Dihub