Author(s): Guo, L (Guo, Liang); Guo, YA (Guo, Yanan); Yang, JK (Yang, Jiankun); Yan, JC (Yan, Jianchang); Liu, JG (Liu, Jianguo); Wang, JX (Wang, Junxi); Wei, TB (Wei, Tongbo)

Source: IEEE PHOTONICS JOURNAL Volume: 14 Issue: 1 Article Number: 8202905 DOI: 10.1109/JPHOT.2021.3129648 Published: FEB 2022

Abstract: In this work, we fabricated and characterized 4 x 4 parallel flip-chip AlGaN-based micro-LED arrays with varied mesa diameters of 120 mu m, 100 mu m, 80 mu m, and 60 mu m. The reported micro-LED arrays have a maximum bandwidth of 380 MHz and a peak wavelength of similar to 275 nm. It is found that the electrical and optical characteristics of AlGaN-based micro-LED arrays show strong size dependence for ultraviolet communication (UVC). The differential resistance increases from 28.8 omega to 112 omega, the external quantum efficiency (EQE) is increased by similar to 30%, and the bandwidth doubles as the diameter of individual micro-LED decreases from 120 mu m to 60 mu m. Our research proves that tailoring the mesa size of parallel flip-chip AlGaN-based micro-LED arrays can further enhance its bandwidth and promote its application in UVC.

Accession Number: WOS:000725791100001

ISSN: 1943-0655

eISSN: 1943-0647

Full Text: https://ieeexplore.ieee.org/document/9623490