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Fabrication and error analysis of a InGaAsP/InP polarization beam splitter based on an asymmetric Mach-Zehnder interferometer

2021-08-16

 

Author(s): Pan, Pan; Wen, Jun; Zha, Shenlong; Cai, Xueyuan; Ma, Hongliang; An, Junming

Source: OPTICAL MATERIALS Volume: 118 Article Number: 111250 DOI: 10.1016/j.optmat.2021.111250 Published: AUG 2021

Abstract: A polarization beam splitter (PBS) based on an asymmetrical Mach-Zehnder interferometer (MZI) is experimentally demonstrated on a InP platform. The experimental results show that the polarization extinction ratios (PERs) are 8 dB and 14 dB for transverse-electric (TE) and transverse-magnetic (TM) polarization at 1550 nm, respectively. The PER is greater than 5 dB/12 dB for TE/TM polarization over the full C band wavelength range. Fabrication errors including the waveguide width, arm length, film thickness, and sidewall are analyzed using the beam propagation method. The width and sidewall are the most sensitive factors that affect the performances of this type of PBS. This analysis will improve the fabrication tolerance of the PBS.

Accession Number: WOS:000672596200001

ISSN: 0925-3467

eISSN: 1873-1252

Full Text: https://www.sciencedirect.com/science/article/pii/S0925346721004511?via%3Dihub



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