Author(s): Wei, L (Wei, Lei); Kuai, XB (Kuai, Xuebao); Bao, YD (Bao, Yidi); Wei, JT (Wei, Jiangtao); Yang, LL (Yang, Liangliang); Song, PS (Song, Peishuai); Zhang, ML (Zhang, Mingliang); Yang, FH (Yang, Fuhua); Wang, XD (Wang, Xiaodong)

Source: MICROMACHINES Volume: 12 Issue: 6 Article Number: 724 DOI: 10.3390/mi12060724 Published: JUN 2021

Abstract: MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

Accession Number: WOS:000666116300001

PubMed ID: 34205469

Author Identifiers:

Author        Web of Science ResearcherID        ORCID Number

Wang, Xiaodong                  0000-0003-0426-1358

eISSN: 2072-666X

Full Text: https://www.mdpi.com/2072-666X/12/6/724