Author(s): Jiang, K (Jiang, Ke); Sun, XJ (Sun, Xiaojuan); Shi, ZM (Shi, Zhiming); Zang, H (Zang, Hang); Ben, JW (Ben, Jianwei); Deng, HX (Deng, Hui-Xiong); Li, DB (Li, Dabing)

Source: LIGHT-SCIENCE & APPLICATIONS Volume: 10 Issue: 1 Article Number: 69 DOI: 10.1038/s41377-021-00503-y Published: MAR 31 2021

Abstract: Ultra-wide band-gap nitrides have huge potential in micro- and optoelectronics due to their tunable wide band-gap, high breakdown field and energy density, excellent chemical and thermal stability. However, their application has been severely hindered by the low p-doping efficiency, which is ascribed to the ultrahigh acceptor activation energy originated from the low valance band maximum. Here, a valance band modulation mode is proposed and a quantum engineering doping method is conducted to achieve high-efficient p-type ultra-wide band-gap nitrides, in which GaN quantum-dots are buried in nitride matrix to produce a new band edge and thus to tune the dopant activation energy. By non-equilibrium doping techniques, quantum engineering doped AlGaN:Mg with Al content of 60% is successfully fabricated. The Mg activation energy has been reduced to about 21meV, and the hole concentration reaches higher than 10(18)cm(-3) at room temperature. Also, similar activation energies are obtained in AlGaN with other Al contents such as 50% and 70%, indicating the universality of the quantum engineering doping method. Moreover, deep-ultraviolet light-emission diodes are fabricated and the improved performance further demonstrates the validity and merit of the method. With the quantum material growth techniques developing, this method would be prevalently available and tremendously stimulate the promotion of ultra-wide band-gap semiconductor-based devices.

Accession Number: WOS:000636352800003

PubMed ID: 33790221

Author Identifiers:

Author        Web of Science ResearcherID        ORCID Number

Li, Dabing         A-1750-2011         0000-0001-5353-1460

ISSN: 2047-7538

Full Text: https://www.nature.com/articles/s41377-021-00503-y