Author(s): Dou, ZQ (Dou, Zhiqiang); Tang, J (Tang, Jun); Liu, ZD (Liu, Zhiduo); Sun, QG (Sun, Qigong); Wang, Y (Wang, Yang); Li, YM (Li, Yamin); Yuan, M (Yuan, Miao); Wu, HJ (Wu, Huijuan); Wang, YJ (Wang, Yijun); Pei, WH (Pei, Weihua); Chen, HD (Chen, Hongda)

Source: MICROMACHINES Volume: 12 Issue: 2 Article Number: 108 DOI: 10.3390/mi12020108 Published: FEB 2021

Abstract: Intraocular pressure (IOP) is an essential indicator of the diagnosis and treatment of glaucoma. IOP has an apparent physiological rhythm, and it often reaches its peak value at night. To avoid missing the peak value at night and sample the entire rhythm cycle, the continuous monitoring of IOP is urgently needed. A wearable contact lens IOP sensor based on a platinum (Pt) strain gauge is fabricated by the micro-electro-mechanical (MEMS) process. The structure and parameters of the strain gauge are optimized to improve the sensitivity and temperature stability. Tests on an eyeball model indicate that the IOP sensor has a high sensitivity of 289.5 mu V/mmHg and excellent dynamic cycling performance at different speeds of IOP variation. The temperature drift coefficient of the sensor is 33.4 mu V/degrees C. The non-invasive IOP sensor proposed in this report exhibits high sensitivity and satisfactory stability, promising a potential in continuous IOP monitoring.

Accession Number: WOS:000622842700001

PubMed ID: 33499080

eISSN: 2072-666X

Full Text: https://www.mdpi.com/2072-666X/12/2/108