Author(s): Liu, WL (Liu, Wenli); Chen, ZJ (Chen, Zeji); Kan, X (Kan, Xiao); Wang, TY (Wang, Tianyun); Jia, QQ (Jia, Qianqian); Zhu, YF (Zhu, Yinfang); Zhao, JC (Zhao, Jicong); Yuan, Q (Yuan, Quan); Yang, JL (Yang, Jinling); Yang, FH (Yang, Fuhua)

Source: JOURNAL OF MICROMECHANICS AND MICROENGINEERING Volume: 31 Issue: 2 Article Number: 025003 DOI: 10.1088/1361-6439/abcdad Published: FEB 2021

Abstract: This work presents three new narrowband radio frequency (RF) microelectromechanical systems (MEMS) filters made from mechanical or electrically coupled resonators with a quality factor Q of over 10 000. A low-stiffness rectangular-frame mechanical coupling beam (RFCB) is designed, and a filter with an RFCB is successfully developed with a center frequency of 75.5 MHz and a percent bandwidth (BW) of 0.4%. In addition, a tunable narrowband filter is achieved with a mechanically coupled four-disk linear structure filter. The center frequencies are 74.47 +/- 0.54 MHz and the percent BW range is 0.48%-2.2%. In order to further simplify the architecture of the filter, a filter based on a single whisper gallery mode disk resonator is demonstrated, which has a center frequency of 79.42 MHz and a BW of only 0.25%. The three different RF MEMS filters have potential applications in wireless communication systems.

Accession Number: WOS:000616957000001

ISSN: 0960-1317

eISSN: 1361-6439

Full Text: https://iopscience.iop.org/article/10.1088/1361-6439/abcdad