Author(s): Zhu, YM (Zhu, Yanming); Lin, RC (Lin, Richeng); Zheng, W (Zheng, Wei); Ran, JX (Ran, Junxue); Huang, F (Huang, Feng)

Source: SCIENCE BULLETIN Volume: 65 Issue: 10 Pages: 827-831 DOI: 10.1016/j.scib.2020.02.018 Published: MAY 30 2020

Abstract: An accurate measurement of the refractive index is necessary for the optical design of both deep ultraviolet laser diodes and light-emitting diodes. Generally, the refractive indices along different crystallographic axes of anisotropic thin films are measured using variable angle spectroscopic ellipsometry. However, there are still some limitations concerning this method. Here we proposed a potential method to measure the band edge refractive index of wide bandgap semiconductor. An aperiodic oscillation emission phenomenon due to the Fabry-Perot effect was observed in the fluorescence spectrum of an AlN film with a thickness of 1500 nm. Based on the characteristics of the fluorescence spectrum and the definition of Fabry-Perot effect, we obtained the ordinary refractive index of the AlN thin film near the band edge directly. This refractive index measurement method is a supplement to the variable angle ellipsometry, and it is a more direct and effective method for transferred film and thinner samples to measure the fluorescence spectrum. (C) 2020 Science China Press. Published by Elsevier B.V. and Science China Press. All rights reserved.

Accession Number: WOS:000531830800011

ISSN: 2095-9273

eISSN: 2095-9281

Full Text: https://www.sciencedirect.com/science/article/pii/S2095927320300815?via%3Dihub