Suspended tungsten trioxide (WO3) gate AlGaN/GaN heterostructure deep ultraviolet detectors with integrated micro-heater
Author(s): Sun, JW (Sun, Jianwen); Zhan, T (Zhan, Teng); Liu, ZW (Liu, Zewen); Wang, JX (Wang, Junxi); Yi, XY (Yi, Xiaoyan); Sarro, PM (Sarro, Pasqualina M.); Zhang, GQ (Zhang, Guoqi)
Source: OPTICS EXPRESS Volume: 27 Issue: 25 Pages: 36405-36413 DOI: 10.1364/OE.27.036405 Published: DEC 9 2019
Abstract: A suspended WO3-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 degrees C. The measured spectral response of WO3-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Accession Number: WOS:000503978100031
PubMed ID: 31873420
ISSN: 1094-4087
Full Text: https://www.osapublishing.org/oe/abstract.cfm?uri=oe-27-25-36405