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High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification

2018-11-29

Authors: He, CG; Zhao, W; Wu, HL; Zhang, S; Zhang, K; He, LF; Liu, NY; Chen, ZT; Shen, B
CRYSTAL GROWTH & DESIGN
Volume: 18 Issue: 11 Pages: 6816-6823 Published: NOV 2018 Document type: Article
DOI: 10.1021/acs.cgd.8b01045
全文链接:https://pubs.acs.org/doi/abs/10.1021%2Facs.cgd.8b01045

 

 



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