A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
2018-09-13
A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
Authors: Liu, XC; Wang, LH; Zhu, YF; Zhao, JY; Zhang, JY; Yang, JL; Yang, FH
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 28 Issue: 11 Published: NOV 2018 Document type: Article
DOI: 10.1088/1361-6439/aad927
全文链接:http://iopscience.iop.org/article/10.1088/1361-6439/aad927