时间: 2013年04月12日(星期五) 上午10:00

地点: 中国科学院半导体研究所5号楼四层LED大会议室

Abstract:Information is vital. There is an ever increasing need to collect and process information and communicate it from and to the world around us. This has to happen fast, accurately, in a non-invasive way, in an energy efficient way. Research and development in Micro-Electro-Mechanical Systems (MEMS) contributes significantly to this “traffic” of information, specifically in the interaction with the world around us. Physical properties and material characteristics are translated into structures and devices that provide specific functionalities. Silicon micromachining is largely responsible for the expansion of sensors and actuators into more complex systems and into areas not traditionally related to microelectronics, such as medicine, biology and transportation. The shift to 3D microstructures has not only added a physical third dimension to silicon planar technology, but it also added a third dimension in terms of functionality and applications. This multidisciplinary field has played and continues to play a very important role in building a bridge between science and society and in having a tangible positive impact on people’s life. Some resent research results and interesting topic and challenges currently being addressed at the Delft Institute of Microsystems and Nanoelectronics (DIMES) at the Delft university of Technology will be presented and discusse

报告人简介： Pasqualina M. Sarro received the Laurea degree (cum laude) in solid-states physics from the University of Naples, Italy, in 1980. From 1981 to 1983, she was a post-doctoral fellow in the Photovoltaic Research Group of the Division of Engineering, Brown University, Rhode Island, U.S.A. In 1987, she received the Ph.D. degree in Electrical Engineering at the Delft University of Technology, the Netherlands. Since then, she has been with the Delft Institute of Microsystems and Nanoelectronics (DIMES), at the Delft University, where she is responsible for research on integrated sensors and MEMS technology. In December 2001 she became Professor in the Department of Microelectronics of which since 2009 she became the Chair. She is the recipient of the 2004 Eurosensors Fellow Award, the AISEM Career Award (2007), the IEEE 2012 Sensors Council Meritorious Award and co-recipient of the Rudolph Kingslake Medal (1997). Since 2006 she is a member of the Royal Netherlands Academy of Sciences (KNAW) and IEEE Fellow. She has co-authored more than 500 publications. She acts as reviewer for technical journals and member of the International Steering Committee for several international conferences. She was the Technical Program Chair for the first 3 IEEE Sensors Conferences (2002-2004) and the General co-chair of IEEE MEMS 2009 Conference.