Optimized fabrication of wafer-level Si waveguides based on 200 mm CMOS platform
2018-10-12
Optimized fabrication of wafer-level Si waveguides based on 200 mm CMOS platform
Authors: Li, B; Tang, B; Zhang, P; Yu, JZ; Liu, XY; Li, ZH
OPTIK
Volume: 172 Pages: 777-782 Published: 2018 Document type: Article
DOI: 10.1016/j.ijleo.2018.07.094
全文链接:https://www.sciencedirect.com/science/article/pii/S0030402618310660